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Nano-inscribed slots Plasma etching Sensors Organic field effect transistor Micro-resonators Micro-résonateurs Electrical performance Organic-inorganic hybrid composites Low-frequency noise Photonique intégrée Deformation PH Organic semiconductor Microcapteur Low-cost silicon nanowires devices Flexible substrate Low temperatures Inkjet printing Integrated optics Microresonators Fonctionnalisation de surface Silicium Μ-Si doped Doping Polycrystalline materials Photoluminescence Integrated photonics Carbon nanotubes Synthesis Silicon Temperature Copper Functionalization ICP-CVD PECVD Resonators Microfluidique Field effect transistors Low temperature electronics Electrodes Silicon nanowires Polymer Diazonium salts Active layer CMOS compatible Deep UV polymer Chalcogenide In-situ doping Thin film transistors Organic electronic devices Mid-IR Méthode des espaceurs Microcapteurs Microcrystalline silicon Resistors Fatty acid Thin Film Transistors Microfluidic Chemical detection Procédé SLS SLS process Bridged cyclo-oligophenylenes Chemical sensors Thin films Microelectronics Polysilicon Silicium microcristallin Microsensors Deep UV210 polymer Electrical stability Polymers Nanowires Infrared Couches minces Nanofils de silicium Organic field effect transistors Gas sensor Sensor Density of states Organic semiconductors Amorphous materials CMOS integrated circuits Nanofils Basse température Photonic Gel/fluid phase transition Low temperature LPCVD Cluster compounds Sensitivity Resistor Photodetector Polycrystalline silicon Nanoribbons Titanium nitride Reproducibilities Organic electronics Flexible electronics Photonics Chemical sensor