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Thin Film Transistors Chemical sensor Infrared Sphingomyelin Polycrystalline materials Microcapteur Field effect transistors Resistors Nanoribbons Low-cost silicon nanowires devices Resistor Microcapteurs Photodetector Basse température LPCVD Silicium PECVD Electrical performance Thin film transistors Nanofils Integrated optics Sensors Inkjet printing ICP-CVD Functionalization Thin films Gas sensor Chalcogenide Fatty acid Reproducibilities Plasma etching Silicium microcristallin Polymer Electrodes Polysilicon CMOS integrated circuits Spacer method Photonics Couches minces Density of states Gel/fluid phase transition Synthesis Nanowires Chemical detection Procédé SLS Microelectronics Microfluidique Photonique intégrée Flexible substrate Microsensors CMOS compatible In-situ doping Microresonators Sensor Sphingomyelin lipids Chemical sensors Copper Mid-IR Polycrystalline silicon Electrical stability Fonctionnalisation de surface Silicon Temperature Photoluminescence Polymers PH Micro-resonators Organic field effect transistor Doping Low temperatures Deep UV polymer Sensitivity Microcrystalline silicon Silicon nanowires Deformation Low temperature Organic electronic devices Resonators Stabilité électrique Organic semiconductors Μ-Si doped Micro-résonateurs Integrated photonics Low temperature electronics Photonic Microfluidic Low-frequency noise Nanofils de silicium Active layer Strain gauge Méthode des espaceurs Organic electronics Flexible electronics Organic field effect transistors Diazonium salts Stretchable electronics SLS process Carbon nanotubes Titanium nitride Amorphous materials